The AVI Photomask Metrology System

Reduce Repairs

    Avoid repairs of masks with sub-spec defects.

    Reduce repair damage.

    [4-12 masks not repaired/month] * 1,500 cost to re-pelliclize

Reduce Mask Returns

    Reduce or eliminate the number of mask returns and penalties due to over-spec defects.

    [3 masks returned/month * 1/2 repaired] * $4,000/mask

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Improve Throughput

Increase Inspection System Utilization and Throughput
    Faster defect review as difficult defects become easy to measure.
    Reduce supervisor and lead operator consultations when dispositioning borderline defects.

Reduce Disposition Uncertainty
    AVI is user-independent: eliminates guessing in defect classification, especially with new employees.
    Works on all masks with or without pellicles.

    Assume Reticle Inspection System costs of $250-$500/hr (KLA 301/351) or $4-$8/min, plus $1/min for 2 employees.
    [15 min/shift * 18 shifts/wk * 4 wk/month] * $5-9/min (KLA + supervisor + tech)

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Improve Production to Schedule

Get more premiums for early delivery
    Reduced repairs allows faster delivery on average

    [4-12 masks not repaired/month * 1/2 lost premium/repair] * $500 premium/mask

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