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No image from the inspection tool (KLA or other).
- Check all video connections, try swapping cables. 90% of video problems are caused by bad connectors.
- Run the test program, “C:\Flashbus\FBG\FBG32.exe”. If you see an image here, but not in Photo32, then check the Digitizer Setup.
- If the video connections are good and even FBG32.exe doesn’t show an image, then try swapping the video capture board (Contact AVI).
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Can’t see dim holes, even when using “contrast” command.
- Increase the brightness of the AVI monitor.
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Measurements are erratic.
- Make sure you are marking the defects correctly.
- Make sure that the Reticle Inspection System contrast and brightness are set to their defaults.
- Make sure that the RIS is operating at the proper magnification and that the Pixels per Micron is correct in the System Setup.
- KLA351 & Starlight: 8000X total magnification; 18 pixels/micron
- KLA353UV & Starlight-UV: 8000X total magnification; 21.5 pixels/micron
- KLA2xx: 10-12 pixels/micron
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Measurements have started coming up wrong.
- Check that magnification is correct.
- If a maintenance operation was performed on the inspection tool, then AVI may need recalibration.
- Make sure that the contrast and brightness on the inspection tool are being set to “normal” for all measurements.
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Error message comes up on the AVI screen or the computer hangs (doesn’t respond).
- Ignore it: press [OK].
- Reboot the computer. Windows should be rebooted at least weekly.
- If it returns consistently, then reboot the computer. If it still comes up consistently, contact your local PC maintenance team.
- If your PC expert says the PC is ok, then contact AVI.
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